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The Key Technologies of SOI Micro-Accelerometer Front Release Process
Zhang, Zhao Yun, Shi, Zhi Gui, He, Xiao Ping, Du, Lian Ming, Zhang, Hui, Peng, BoVolume:
562-565
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.562-565.192
Date:
July, 2013
File:
PDF, 676 KB
english, 2013