Fabrication of Si Nanowire Biosensor Using FIB and its...

Key Engineering Materials 2013 / 12 Vol. 596

Fabrication of Si Nanowire Biosensor Using FIB and its Evaluations

Truong, Anh Hoang, Sone, Hayato, Hosaka, Sumio
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Volume:
596
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.596.224
Date:
December, 2013
File:
PDF, 2.43 MB
english, 2013
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