Micropipe Healing in Liquid Phase Epitaxial Growth of SiC

Micropipe Healing in Liquid Phase Epitaxial Growth of SiC

Yakimova, Rositza, Syväjärvi, Mikael, Rendakova, S.V., Dmitriev, Vladimir, Henry, Anne, Janzén, Erik
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Volume:
338-342
Year:
2000
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.338-342.237
File:
PDF, 547 KB
english, 2000
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