Damage Reduction in Channeled Ion Implanted 6H-SiC

Morvan, Erwan, Mestres, Narcis, Campos, F.J., Pascual, Jordi, Hallén, Anders, Linnarsson, Margareta K., Kuznetsov, Andrej Yu.

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Volume:

338-342

Year:

2000

Journal:

Materials Science Forum

DOI:

10.4028/www.scientific.net/msf.338-342.893

File:

PDF, 355 KB

2000

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