SiC Power Devices on QUASIC and SiCOI Smart-Cut®...

Materials Science Forum 2003 Vol. 433-436

SiC Power Devices on QUASIC and SiCOI Smart-Cut® Substrates: First Demonstrations

Letertre, Fabrice, Daval, N., Templier, Francois, Bano, Edwige, Planson, Dominique, Di Cioccio, Lea, Jalaguier, E., Bluet, Jean Marie, Billon, Thierry, Madar, Roland, Chante, Jean-Pierre
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.433-436.813
File:
PDF, 612 KB
english, 2003
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