SEM Visibility of Stacking Faults in 4H-Silicon Carbide...

Materials Science Forum 2003 Vol. 433-436

SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers

Zimmermann, Uwe, Österman, John, Galeckas, Augustinas, Hallén, Anders
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.433-436.937
File:
PDF, 708 KB
english, 2003
Conversion to is in progress
Conversion to is failed