Structural Characterization of Thin 3C-SiC Films Annealed by the Flash Lamp Process
Polychroniadis, E.K., Stoemenos, J., Ferro, Gabriel, Monteil, Yves, Panknin, D., Skorupa, WolfgangVolume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.457-460.351
File:
PDF, 1.77 MB
english, 2004