Effect of Thermal Field on Interface Step Structures during...

Materials Science Forum 2004 Vol. 457-460

Effect of Thermal Field on Interface Step Structures during PVT Growth of (0001)Si 6H-SiC

Herro, Z.G., Epelbaum, Boris M., Bickermann, Matthias, Masri, Pierre M., Winnacker, Albrecht
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Volume:
457-460
Year:
2004
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.457-460.95
File:
PDF, 372 KB
2004
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