Modal and Stability Analysis of a Micro-Beam Structure Actuated by Electrostatic Force
Yoo, Hong Hee, Jung, Kang Sik, Moon, Seung JaeVolume:
505-507
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.505-507.403
File:
PDF, 624 KB
english, 2006