Resistivity Distribution in Undoped 6H-SiC Boules and...

Materials Science Forum 2006 Vol. 527-529

Resistivity Distribution in Undoped 6H-SiC Boules and Wafers

Li, Qiang, Polyakov, A.Y., Skowronski, Marek, Sanchez, Edward K., Loboda, Mark J., Fanton, Mark A., Bogart, Timothy, Gamble, Rick D., Smirnov, N.B., Makarov, Yuri N.
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.527-529.51
File:
PDF, 273 KB
english, 2006
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