Characterization of Ti/Al Ohmic Contacts to p-Type 4H-SiC...

Materials Science Forum 2006 Vol. 527-529

Characterization of Ti/Al Ohmic Contacts to p-Type 4H-SiC Using Cathodoluminescence and Auger Electron Spectroscopies

Gao, M., Tumakha, Sergey P., Onishi, T., Tsukimoto, Susumu, Murakami, Masanori, Brillson, Leonard J.
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.527-529.891
File:
PDF, 767 KB
english, 2006
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