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Morphology and Stress Control in UHVCVD of 3C-SiC(100) on Si
Pezoldt, Jörg, Förster, Christian, Stauden, Thomas, Cimalla, Volker, Morales, Francisco M., Zgheib, Charbel, Masri, Pierre M., Ambacher, OliverVolume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.556-557.203
File:
PDF, 782 KB
english, 2007