Defect Etching of Non-Polar and Semi-Polar Faces in SiC

Materials Science Forum 2007 Vol. 556-557

Defect Etching of Non-Polar and Semi-Polar Faces in SiC

Sakwe, Sakwe Aloysius, Jang, Yeon Suk, Wellmann, Peter J.
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Volume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.556-557.243
File:
PDF, 902 KB
english, 2007
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