Improvement of Surface Roughness for 4H-SiC Epilayers Grown...

Materials Science Forum 2010 / 4 Vol. 645-648

Improvement of Surface Roughness for 4H-SiC Epilayers Grown on 4° Off-Axis Substrates

Aigo, Takashi, Tsuge, Hiroshi, Yashiro, Hirokatsu, Fujimoto, Tatsuo, Katsuno, Masakazu, Nakabayashi, Masashi, Hoshino, Taizo, Ohashi, Wataru
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.645-648.119
Date:
April, 2010
File:
PDF, 617 KB
english, 2010
Conversion to is in progress
Conversion to is failed