Deep Defects in 3C-SiC Generated by H+- and He+-Implantation or by Irradiation with High-Energy Electrons
Weidner, Michael, Trapaidze, Lia, Pensl, Gerhard, Reshanov, Sergey A., Schöner, Adolf, Itoh, Hisayoshi, Ohshima, Takeshi, Kimoto, TsunenobuVolume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.645-648.439
Date:
April, 2010
File:
PDF, 450 KB
english, 2010