Improved Epilayer Surface Morphology on 2˚ Off-Cut 4H-SiC...

Materials Science Forum 2014 / 2 Vol. 778-780

Improved Epilayer Surface Morphology on 2˚ Off-Cut 4H-SiC Substrates

Lilja, Louise, Ul Hassan, Jawad, Janzén, Erik, Bergman, Peder
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Volume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.778-780.206
Date:
February, 2014
File:
PDF, 600 KB
english, 2014
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