Removal of Slurry Residues in Tungsten Plug during Chemical...

Solid State Phenomena 2007 Vol. 124-126

Removal of Slurry Residues in Tungsten Plug during Chemical Mechanical Planarization

Yang, Chan Ki, Park, Jin Goo, Jo, Jung Hun, Lim, Geun Sik, Kim, Tae Hyung, Jo, In Soo
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Volume:
124-126
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.124-126.157
File:
PDF, 1.34 MB
english, 2007
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