Laser-Crystallisation of Amorphous Si Layers and...

Laser-Crystallisation of Amorphous Si Layers and Two-Dimensional Simulations of the Process Dynamics

Nerding, M., Christiansen, S., Vogler, S., Andrä, G., Falk, Fritz, Strunk, Horst P.
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Volume:
80-81
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.80-81.187
File:
PDF, 599 KB
2001
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