Kinetics of electrochemical corrosion of silicon wafers in...

Kinetics of electrochemical corrosion of silicon wafers in dilute HF solutions

Valérie Bertagna, Christian Plougonven, François Rouelle, Marius Chemla
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Volume:
422
Year:
1997
Language:
english
Pages:
9
DOI:
10.1016/s0022-0728(96)04902-9
File:
PDF, 1.00 MB
english, 1997
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