![](/img/cover-not-exists.png)
Kinetics of electrochemical corrosion of silicon wafers in dilute HF solutions
Valérie Bertagna, Christian Plougonven, François Rouelle, Marius ChemlaVolume:
422
Year:
1997
Language:
english
Pages:
9
DOI:
10.1016/s0022-0728(96)04902-9
File:
PDF, 1.00 MB
english, 1997