Micromorphology changes of silicon oxide on Si(111) during...

Micromorphology changes of silicon oxide on Si(111) during current oscillations: a comparative in situ AFM and FTIR study

Oliver Nast, Stefan Rauscher, Helmut Jungblut, Hans-Joachim Lewerenz
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Volume:
442
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0022-0728(97)00476-2
File:
PDF, 764 KB
english, 1998
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