Modulation of Growth Rate by Electric Current in...

Japanese Journal of Applied Physics 2013 / 08 Vol. 52; Iss. 8R

Modulation of Growth Rate by Electric Current in Liquid-Phase Epitaxy of 4H-SiC

Mitani, Takeshi, Okamura, Masayuki, Takahashi, Tetsuo, Komatsu, Naoyoshi, Kato, Tomohisa, Okumura, Hajime
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.085503
Date:
August, 2013
File:
PDF, 659 KB
english, 2013
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