Lead-Free Piezoelectric MEMS Energy Harvesters of...

Japanese Journal of Applied Physics 2013 / 09 Vol. 52; Iss. 9S1

Lead-Free Piezoelectric MEMS Energy Harvesters of (K,Na)NbO 3 Thin Films on Stainless Steel Cantilevers

Tsujiura, Yuichi, Suwa, Eisaku, Kurokawa, Fumiya, Hida, Hirotaka, Suenaga, Kazufumi, Shibata, Kenji, Kanno, Isaku
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.09kd13
Date:
September, 2013
File:
PDF, 702 KB
english, 2013
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