Effect of Plasma-On Time on the Axial Distribution of Film Thickness in Internal Diamond-Like Carbon Coating with Microwave-Excited High-Density Plasma
Matsui, Ryosuke, Kousaka, Hiroyuki, Umehara, NoritsuguVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.11na01
Date:
November, 2013
File:
PDF, 191 KB
english, 2013