Highly-Crystallized Ge:H Film Growth from GeH 4 Very High Frequency Inductively-Coupled Plasma: Crystalline Nucleation Initiated by Ni Nanodots
Makihara, Katsunori, Gao, Jin, Sakaike, Kouhei, Hayashi, Shohei, Deki, Hidenori, Ikeda, Mitsuhisa, Higashi, Seiichiro, Miyazaki, SeiichiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.11na04
Date:
November, 2013
File:
PDF, 2.00 MB
english, 2013