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Influence of low energy argon plasma treatment on the moisture barrier performance of hot wire-CVD grown SiN x multilayers
Majee, Subimal, Cerqueira, Maria Fátima, Tondelier, Denis, Geffroy, Bernard, Bonnassieux, Yvan, Alpuim, Pedro, Bourée, Jean EricVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.53.05fm05
Date:
January, 2014
File:
PDF, 90 KB
english, 2014