Evaluation of fluorosurfactant distribution in ultrathin UV...

Japanese Journal of Applied Physics 2014 / 06 Vol. 53; Iss. 6S

Evaluation of fluorosurfactant distribution in ultrathin UV nanoimprint resin by X-ray photoelectron spectroscopy

Oyama, Takahiro, Okada, Makoto, Iyoshi, Shuso, Haruyama, Yuichi, Matsui, Shinji
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.53.06jk06
Date:
June, 2014
File:
PDF, 191 KB
english, 2014
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