Effectiveness of hydrogen dilution for designing amorphous to crystalline Si thin film in inductively coupled plasma assisted magnetron sputtering
Shin, Kyung Sik, Sahu, Bibhuti Bhusan, Han, Jeon Geon, Hori, MasaruVolume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.54.060303
Date:
June, 2015
File:
PDF, 738 KB
english, 2015