Effectiveness of hydrogen dilution for designing amorphous...

Effectiveness of hydrogen dilution for designing amorphous to crystalline Si thin film in inductively coupled plasma assisted magnetron sputtering

Shin, Kyung Sik, Sahu, Bibhuti Bhusan, Han, Jeon Geon, Hori, Masaru
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.54.060303
Date:
June, 2015
File:
PDF, 738 KB
english, 2015
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