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Selective Liquid Phase Oxidation of AlGaAs and Application to AlGaAs∕InGaAs Pseudomorphic High Electron Mobility Transistor
Lee, Kuan-Wei, Lin, Hsien-Chang, Lee, Fang-Ming, Wang, Yeong-HerVolume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3185855
File:
PDF, 684 KB
english, 2009