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Ion Implantation Through Thin Silicon Dioxide Layers for Si-based Solid-State Quantum Computer Device Development
McCallum, Jeffrey, Dunn, Michael L., Gauja, EricVolume:
1074
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1074-I12-05
Date:
January, 2008
File:
PDF, 223 KB
english, 2008