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Fast-fabrication process for low environmental impact microsystems
Lemaire, Etienne, Thuau, Damien, Caillard, Benjamin, Dufour, IsabelleLanguage:
english
Journal:
Journal of Cleaner Production
DOI:
10.1016/j.jclepro.2015.05.111
Date:
June, 2015
File:
PDF, 4.09 MB
english, 2015