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[IEEE 2014 Symposium on Piezoelectricity,Acoustic Waves, and Device Applications (SPAWDA) - Beijing, China (2014.10.30-2014.11.2)] Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications - Surface acoustic wave propagation characteristics of ScAlN/diamond structure with buried electrode
Zhang, Qiao-zhen, Han, Tao, Wang, Wei-biao, Hashimoto, Ken-ya, Chen, JingYear:
2014
Language:
english
DOI:
10.1109/SPAWDA.2014.6998578
File:
PDF, 831 KB
english, 2014