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SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Speed rate improvement for microcutting of thin silicon with femtosecond laser pulses
Toenshoff, Hans K., Ostendorf, Andreas, Koerber, Klaus, Baersch, Niko, Miyamoto, Isamu, Kobayashi, Kojiro F., Sugioka, Koji, Poprawe, Reinhart, Helvajian, HenryVolume:
4830
Year:
2003
Language:
english
DOI:
10.1117/12.486543
File:
PDF, 583 KB
english, 2003