[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Effects of B or Al Interface Layers on Thermal Stability of Ni Silicide on Si
Tsutsui, Kazuo, Shiozawa, Takashi, Nagahiro, Koji, Ohishi, Yoshihisa, Kakushima, Kuniyuki, Ahmet, Parhat, Urushihara, Nobuaki, Suzuki, Mineharu, Iwai, HiroshiVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911524
File:
PDF, 739 KB
english, 2008