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[ECS 2009 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT) - Xi'an, China (July 5 - July 10, 2009)] ECS Transactions - Substrate Engineering for 32nm and Beyond
Nguyen, Bich-Yen, Mazuré, Carlos, Celler, GeorgeYear:
2009
Language:
english
DOI:
10.1149/1.3152965
File:
PDF, 507 KB
english, 2009