Improvement of the Thermal Stability of NiSi by Germanium Ion Implantation
Tsui, Bing-Yue, Hsieh, Chih-Ming, Hung, Yu-Ren, Yang, York, Shen, Ryan, Cheng, Sam, Lin, TonyVolume:
157
Year:
2010
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3261852
File:
PDF, 449 KB
english, 2010