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Ion Assisted ETP-CVD a-Si:H at Well Defined Ion Energies
Wank, Michael A., van Swaaij, René, van de Sanden, M.Volume:
1153
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1153-A17-06
Date:
January, 2009
File:
PDF, 114 KB
english, 2009