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The Deterioration of a-IGZO TFTs Owing to the Copper Diffusion after the Process of the Source∕Drain Metal Formation
Tai, Ya-Hsiang, Chiu, Hao-Lin, Chou, Lu-ShengVolume:
159
Year:
2012
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.025206jes
File:
PDF, 377 KB
english, 2012