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SPIE Proceedings [SPIE Applications of Photonic Technology - Unknown, United States (Wednesday 1 January 2003)] Applications of Photonic Technology 6 - Plasma etch optimization of a photo-sensitive benzocyclobutene (BCB) planarisation layer for photonic integrated circuit manufacturing
Robinson, Jason D., Humphreys, Bedwyr, Lessard, Roger A., Lampropoulos, George A.Volume:
5260
Year:
2003
Language:
english
DOI:
10.1117/12.543534
File:
PDF, 1.02 MB
english, 2003