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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 1 February 2014)] Integrated Optics: Devices, Materials, and Technologies XVIII - Application of atomic layer deposition in nanophotonics
Broquin, Jean Emmanuel, Nunzi Conti, Gualtiero, Karvonen, Lasse, Säynätjoki, Antti, Roussey, Matthieu, Kuittinen, Markku, Honkanen, SeppoVolume:
8988
Year:
2014
Language:
english
DOI:
10.1117/12.2042263
File:
PDF, 1.04 MB
english, 2014