The Business of Fast ALD Equipment for Depositing Alumina Passivation Layers on Crystalline Silicon Solar Cells.
Vermeer, Ad, Gortzen, Roger, Poodt, P., Roozeboom, F.Volume:
1353
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.1497
Date:
January, 2011
File:
PDF, 3.13 MB
english, 2011