(Invited) Defect Generation in Device Processing and Impact...

ECS Transactions 2013 / 03 Vol. 50; Iss. 5

(Invited) Defect Generation in Device Processing and Impact on the Electrical Performances

Polignano, M. L., Mica, I., Carnevale, G. P., Mauri, A., Bonera, E., Speranza, S.
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Volume:
50
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05005.0303ecst
Date:
March, 2013
File:
PDF, 281 KB
english, 2013
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