Irradiation Damage in SiO 2 /Si System Induced by Photons and/or Ions in Photo-Oxidation and Plasma-Oxidation
Okamoto, Tetsuya, Ide, Tetsuya, Sasaki, Atsushi, Azuma, Kazufumi, Nakata, YukihikoVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.8002
Date:
December, 2004
File:
PDF, 150 KB
english, 2004