New oxide nanoparticle extreme-UV photoresists achieve high...

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SPIE Newsroom 2014 / 09

New oxide nanoparticle extreme-UV photoresists achieve high sensitivity

Ober, Christopher, Giannelis, Emmanuel
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Language:
english
Journal:
SPIE Newsroom
DOI:
10.1117/2.1201409.005552
Date:
September, 2014
File:
PDF, 567 KB
english, 2014
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