Pattern Formation on Silicon-on-Insulator

MRS Proceedings 2004 / 1 Vol. 849

Pattern Formation on Silicon-on-Insulator

Flack, Frank S., Yang, Bin, Huang, Minghuang, Marcus, Matt, Simmons, Jason, Castellini, Olivia M., Eriksson, Mark A., Liu, Feng, Lagally, Max G.
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Volume:
849
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-849-KK1.3/JJ1.3/U1
Date:
January, 2004
File:
PDF, 1.45 MB
english, 2004
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