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SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Experimental investigations of creep in gold RF-MEMS microstructures
Sánchez-Rojas, José Luis, Brama, Riccardo, Somà, Aurelio, De Pasquale, Giorgio, Saleem, Muhammad MubasherVolume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2181071
File:
PDF, 2.76 MB
english, 2015