Analysis of Large Particle Count in Fumed Silica Slurries...

Journal of The Electrochemical Society 2006 Vol. 153; Iss. 5

Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP

Remsen, Edward E., Anjur, Sriram, Boldridge, David, Kamiti, Mungai, Li, Shoutian, Johns, Timothy, Dowell, Charles, Kasthurirangan, Jaishankar, Feeney, Paul
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Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2184036
File:
PDF, 358 KB
english, 2006
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