Investigation of Amorphous IGZO TFT Employing Ti/Cu...

MRS Proceedings 2011 / 1 Vol. 1321

Investigation of Amorphous IGZO TFT Employing Ti/Cu Source/Drain and SiNx Passivation

Lee, Young Wook, Choi, Sung-Hwan, Lee, Jeong-Soo, Kwon, Jang-Yeon, Han, Min-Koo
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Volume:
1321
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.1091
Date:
January, 2011
File:
PDF, 238 KB
english, 2011
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