A comparative study of donor formation in dysprosium,...

Journal of Luminescence 1998 Vol. 80; Iss. 1-4

A comparative study of donor formation in dysprosium, holmium, and erbium implanted silicon

V.V Emtsev, V.V Emtsev Jr, D.S Poloskin, E.I Shek, N.A Sobolev
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Volume:
80
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0022-2313(98)00135-5
File:
PDF, 103 KB
english, 1998
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