Mechanical Characterization of Atomic Layer Deposited (ALD)...

MRS Proceedings 2009 / 1 Vol. 1222

Mechanical Characterization of Atomic Layer Deposited (ALD) Alumina for Applications in Corrosive Environments

Ou, Kuang-Shun, Lin, I-Kuan, Wu, Ping-Hsin, Huang, Zhi-Kai, Chen, Kuo-Shen, Zhang, Xin
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Volume:
1222
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1222-DD02-14
Date:
January, 2009
File:
PDF, 605 KB
english, 2009
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