Effects of Pad Grooves on Chemical Mechanical Planarization

Effects of Pad Grooves on Chemical Mechanical Planarization

Wang, Yao-Chen, Yang, Tian-Shiang
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Volume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2716558
File:
PDF, 171 KB
english, 2007
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